Dr. Mei Sun

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  Dr. Mei Sun as VP of SensArray Sensor Research - [Cached Version]
  Published on: 6/24/1998    Last Visited: 9/12/2008  

  SensArray" Corporation has appointed Dr. Mei Sun to the newly created position of Vice President of Sensor Research and Development.Mei is a 17-year veteran of Luxtron with more than 20 years of experience developing sensors and instrumentation for semiconductor and medical applications.At SensArray, she will apply her technical expertise and innovative approach to develop sensor technologies and expand the company's direct in situ wafer temperature measurement product lines.
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  Sun earned a B.S. in chemistry from the College of Notre Dame of Maryland and a Ph.D in physical chemistry/spectroscopy from the University of Maryland.She is the author of 12 patents and numerous published technical papers.

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  Embedded Technology Journal - [Cached Version]
  Published on: 7/12/2006    Last Visited: 8/15/2006  

  Dr. Mei Sun, SensArray's vice president of Sensor Engineering, explains that "previous wafer-based metrology systems had application-specific limitations due to their inherent design; the sensors and data analysis unit in the wafer were protected with encapsulant materials protruding over the wafer surface, causing uneven profile.

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  SensArray Broadens Plasma and Wet Environment Solutions - [Cached Version]
  Published on: 6/28/2004    Last Visited: 9/12/2008  

  "We regularly talk with our customers about the metrology tools that they need to successfully produce high-quality products," said Mei Sun, vice president, sensor engineering, SensArray.

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  SensArray Introduces APTI Peak Temperature Monitor - [Cached Version]
  Published on: 6/20/2000    Last Visited: 9/12/2008  

  According to Dr. Mei Sun, Vice President of Research and Development for SensArray, "Our extensive studies have found that stick-on decals do not accurately measure wafer temperature and can be in error by as much as 20°C to 30°C.
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  The convenience and accuracy of APTI wafers should lead to their fast acceptance as an invaluable temperature verification tool for critical etch processes," Dr. Sun continued.

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  SensArray Introduces Field Installable Sensors for FPD - [Cached Version]
  Published on: 2/2/2004    Last Visited: 9/12/2008  

  "The Process Probe 2050 is the first field-installable process optimization tool on the market that allows flat panel manufacturers to improve equipment performance and panel quality, while reducing cost of ownership," said Mei Sun, vice president, sensor engineering, SensArray.

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  SensArray Introduces Integral Wafer For Plasma, Wet And - [Cached Version]
  Published on: 7/12/2006    Last Visited: 1/7/2007  

  Dr. Mei Sun, SensArray's vice president of Sensor Engineering, explains that "previous wafer-based metrology systems had application-specific limitations due to their inherent design; the sensors and data analysis unit in the wafer were protected with encapsulant materials protruding over the wafer surface, causing uneven profile.

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  SensArray Introduces Sensor Probe 1400 Series - [Cached Version]
  Published on: 1/22/2002    Last Visited: 9/12/2008  

  "Historically, temperature measurement of outside the direct wafer used inaccurate sensors and inconvenient tools and did not help customers understand the correlation of equipment temperature to wafer temperature," said Mei Sun, vice president, Sensors, SensArray Corporation.

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  SensArray Introduces the Accura°C - [Cached Version]
  Published on: 12/3/2003    Last Visited: 9/12/2008  

  "Accura°C is the first process optimization tool on the market that allows customers to monitor and adjust the temperature of the wafer during a thermal cycle in real time," said Mei Sun, vice president, sensor engineering, SensArray.

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  SensArray Solutions for Flat Panel Manufacturing - [Cached Version]
  Published on: 6/28/2004    Last Visited: 9/12/2008  

  "The rapid growth of the flat panel display industry is presenting new challenges for equipment and display manufacturers," said Mei Sun, vice president, sensor engineering, SensArray.

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  Solid State Technology - semiconductor manufacturing... - [Cached Version]
  Published on: 1/1/2003    Last Visited: 1/10/2003  

  For more information, contact Mei Sun, SensArray Corp., 47451 Fremont Blvd., CA 94538; ph 510/360-5600, fax 510/360-5601, mei sun@sensarray.com.
  
  Solid State Technology January, 2003

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