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Amit S. Kelkar

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Atmel Corporation
San Jose, California
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    Reissue Application Notice - OG Date: 13 April 2004 - [Cached Version]
    Published on: 4/13/2004    Last Visited: 5/2/2004  

    438/778, METHOD OF FORMING PRE-METAL DIELECTRIC FILM ON A SEMICONDUCTOR SUBSTRATE INCLUDING FIRST LAYER OF UNDOPED OXIDE OF HIGH OZONE: TEOS VOLUME RATIO AND SECOND LAYER OF LOW OZONE DOPED BPSG, Amit S. Kelkar, et al., Owner of Record: Atmel Corporation, San Jose, CA, Attorney or Agent: Thomas Schneck, Ex.

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