Mr. Hans-Jochen Kahl

Leo Berlinghieri, Hans-Jochen Kahl and Louis P. Valente are currently proposed for election to serve as Class I Directors.
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THE BOARD OF DIRECTORS BELIEVES THAT APPROVAL OF THE ELECTION OF LEO BERLINGHIERI, HANS-JOCHEN KAHL AND LOUIS P. VALENTE TO SERVE AS CLASS I DIRECTORS IS IN THE BEST INTERESTS OF MKS AND ITS SHAREHOLDERS AND THEREFORE RECOMMENDS A VOTE "FOR" THIS PROPOSAL.
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*Hans-Jochen Kahl(3)
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Mr. Kahl has served as a director of MKS since January 2001.From June 1994 through September 1996, Mr. Kahl served as a consultant to Ebara, a Japanese manufacturer of industrial water pumps and vacuum process equipment for the semiconductor industry.Mr. Kahl was employed by Leybold AG, formerly Leybold-Heraeus GmbH, a leading international manufacturer of vacuum pumps and other vacuum process equipment for the semiconductor industry, from July 1983 to March 1992, where he served as a managing director and was primarily responsible for sales, marketing and strategic planning.From September 1995 to November 2000, he was a director of Applied Science and Technology, Inc. (ASTeX) which was acquired by MKS.Since November 1996, he has served as a director of Solid State Management, a privately held manufacturer of high precision measurement tools.

Hans-Jochen Kahl(2)
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Hans-Jochen Kahl Mr. Kahl has served as a director of MKS since January 2001.From June 1994 through September 1996, Mr. Kahl served as a consultant to Ebara, a Japanese manufacturer of industrial water pumps and vacuum process equipment for the semiconductor industry.Mr. Kahl was employed by Leybold AG, formerly Leybold-Heraeus GmbH, a leading international manufacturer of vacuum pumps and other vacuum process equipment for the semiconductor industry, from July 1983 to March 1992, where he served as a managing director and was primarily responsible for sales, marketing and strategic planning.From September 1995 to November 2000, he was a director
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Bertucci, Berlinghieri, Anderson, Berges, Chute, Kahl, Robbins and Valente attended the 2006 annual meeting of shareholders.
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Chute (Chairman), Kahl and Robbins.
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Mr. Kahl served on the committee until May 2006, when Mr. Berges replaced him.

0001202779 KAHL HANS JOCHEN 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 1 0 0 0

0001202779 KAHL HANS JOCHEN 90 INDUSTRIAL WAY WILMINGTON MA 01887 1 0 0 0

Hans-Jochen Kahl(3) Director
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Mr. Kahl has served as a director of MKS since January 2001.From June 1994 through September 1996, Mr. Kahl served as a consultant to Ebara, a Japanese manufacturer of industrial water pumps and vacuum process equipment for the semiconductor industry.Mr. Kahl was employed by Leybold AG, formerly Leybold-Heraeus GmbH, a leading international manufacturer of vacuum pumps and other vacuum process equipment for the semiconductor industry, from July 1983 to March 1992, where he served as a managing director and was primarily responsible for sales, marketing and strategic planning.From September 1995 to November 2000, he was a director of Applied Science and Technology, Inc. (ASTeX) which was acquired by MKS.Since November 1996, he has served as a director of Solid State Management, a privately held manufacturer of high precision measurement tools.

0001202779 KAHL HANS JOCHEN SIX SHATTUCK ROAD ANDOVER MA 018102449 1 0 0 0

Hans-Jochen KahlManaging Director (retired)Leybold AG

Hans-Jochen Kahl(3)
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Mr. Kahl has served as a director of MKS since January 2001.From June 1994 through September 1996, Mr. Kahl served as a consultant to Ebara, a Japanese manufacturer of industrial water pumps and vacuum process equipment for the semiconductor industry.Mr. Kahl was employed by Leybold AG, formerly Leybold-Heraeus GmbH, a leading international manufacturer of vacuum pumps and other vacuum process

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equipment for the semiconductor industry, from July 1983 to March 1992, where he served as a managing director and was primarily responsible for sales, marketing and strategic planning.From September 1995 to November 2000, he was a director of Applied Science and Technology, Inc. (ASTeX) which was acquired by MKS.Since November 1996, he has served as a director of Solid State Management, a privately held manufacturer of high precision measurement tools.

Hans-Jochen Kahl(3)
...
Mr. Kahl has served as a director of MKS since January 2001.From June 1994 through September 1996, Mr. Kahl served as a consultant to Ebara, a Japanese manufacturer of industrial water pumps and vacuum process equipment for the semiconductor industry.Mr. Kahl was employed by Leybold AG, formerly Leybold-Heraeus GmbH, a leading international manufacturer of vacuum pumps and other vacuum process

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equipment for the semiconductor industry, from July 1983 to March 1992, where he served as a managing director and was primarily responsible for sales, marketing and strategic planning.From September 1995 to November 2000, he was a director of Applied Science and Technology, Inc. (ASTeX) which was acquired by MKS.Since November 1996, he has served as a director of Solid State Management, a privately held manufacturer of high precision measurement tools.