SMP Order -
[Cached Version]
Published on: 8/16/1999
Last Visited: 10/25/2000
Bob Hollands
Vice President, Marketing
STEAG Electronic Systems
Phone : 602/777-0021
Fax : 602/777-0025
e-mail : bhollands@steag.com
Agency :
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Commenting on the recent win, Bob Hollands, vice president of marketing for STEAG Electronic Systems, noted that in addition to signaling SMP's continuous satisfaction with STEAG's RTP solutions, the order further entrenches STEAG as a leading supplier of RTP systems in Singapore.Due to its inherent superior process performance, throughput and low cost advantages, we are seeing increasing adoption of RTP in this key region, especially as chipmakers transition to 0.25-micron and smaller design rules.As manufacturing requirements become increasingly stringent for the production of these advanced devices, we are fully prepared to grow our market share in this geographic area through our comprehensive portfolio of reliable, leading-edge RTP solutions..
STEAG's AST 2800 is an advanced 200 mm RTP tool designed for high-volume production of 0.25-micron devices.Configured with the company's proprietary RTP RippleÔ-based pyrometry, the AST 2800 allows for accurate, repeatable wafer temperature control regardless of the wafer backside conditions that can negatively impact yield.In addition, the AST 2800 can achieve ramp rates of over 150°C/second, while maintaining excellent temperature uniformity and precise ambient control necessary for ultra-shallow junction processing.