Lee Chen

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Tokyo Electron America Inc.

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sst.pennnet.com/Articles/Article_Display.cfm?Section=AR - [Cached Version]
Published on: 10/6/2008 Last Visited: 12/3/2007
Lee Chen received his PhD in applied physics from Columbia U. and is principal engineer at Tokyo Electron America (TEA), 2400 Grove Blvd., Austin, TX 78741; ph 512/424-1000, e-mail lee.chen@us.tel.com.
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Author(s) : Lee Chen Masaaki Hagihara Hiromitsu Kambara Akira Koshiishi
Solid State Technology - Controlling porous low-k... - [Cached Version]
Published on: 2/28/2006 Last Visited: 3/14/2006
Lee Chen received his PhD in applied physics from Columbia U. and is principal engineer at Tokyo Electron America (TEA), 2400 Grove Blvd., Austin, TX 78741; ph 512/424-1000, e-mail lee.chen@us.tel.com.
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Author(s) : Lee Chen Masaaki Hagihara Hiromitsu Kambara Akira Koshiishi

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