Steve Moffatt, CTO, Front-end Equipment at Applied Materials (also a speaker at the Next Generation Eco Fab session at the Sustainable Manufacturing Forum at SEMICON West), told SEMI that many established procedures for dealing with arsine and phosphine already exist.
views the efforts by the industry going forward as one of accurately quantifying the size and scope of the problem.
"The methods are in place, but the absolute quantities of III-Vs will be substantially higher," said Moffatt
Additionally, other emissions (e.g., PFCs) that are well regulated and generally understood, will see an increase in the quantities as a result of more layers being processed for 3D chips.
Even the potential transition to 450mm wafers will figure into the industry's need for a more accurate scope of the EHS challenges involved.
The increase in wafer size will naturally lead to larger manufacturing equipment noted Moffatt
and that, in turn, will drive increases in energy, water, and process chemical consumption at both the tool and fab levels.
As regulatory pressure increases on a global scale, the situation also becomes more complex.
Beyond the use of new materials such as III-Vs and nanomaterials, Moffatt
commented that new methods of energetics (i.e., ways of putting energy into a processing system) will require very careful and close assessment of the risk control measures.
Another sustainability issue arises from the basic fact that, as opposed to the highly prevalent element of silicon in the earth's crust, many of the newer materials being used in higher quantities for semiconductor manufacturing (e.g.,Ga, As, etc.) are much less abundant.
These exotic materials, of necessity, must be handled in the most efficient of ways.
Going forward, there will be increased regulatory pressure to reduce a fab's carbon footprint and produce more sustainable products.
says the industry can expect more pressure to reduce greenhouse gas (GHG) emissions along with adhering to conflict minerals regulations and managing EHS concerns throughout the entire life-cycle of a product (Figure 2).
"One company can't do it on its own, it's a life-cycle consideration," said Moffatt
Regarding standards activities on energetics, Moffatt
pointed to ongoing collaboration and hazard assessment between SEMI, SEMATECH
and other industry groups.
"We will need to continually evaluate the need for additional standards activities - both new and updates - in addition to industry collaboration on "Green" chemistry," said Moffatt
"As a starting point, sustainability concerns could be built into the initial assessment of new chemicals and processes, which will begin the discussion and raise awareness of these issues."
Hill (SEMATECH) and Moffatt (Applied Materials) will be joined by speakers from IMEC, Intel, Samsung, Air Products, and MW Group at the "Next Generation Eco Fab" session of the Sustainable Manufacturing Forum at SEMICON West 2014, July 7-10 in San Francisco, Calif. For more information, visit: http://www.semiconwest.org.