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Background Information

Employment History

Manager of the Compound Semiconductor Business Unit
SUSS MicroTec AG

International Product Manager, Coating Business
SUSS MicroTec AG

Director of Marketing
SUSS MicroTec AG

Web References (26 Total References)

Presented by: Jim ...

www.suss.com [cached]

Presented by: Jim Hermanowski - SUSS MicroTec Date: Fri, 2010-03-12 during the 3D Integration Workshop

[18.03.02] SUSS say new technology allows low-cost sub-micron lithography

www.fabtech.org [cached]

"Until now, multi-million dollar stepper technology was the only solution for volume production of sub-micron images," commented James Hermanowski, manager of the compound semiconductor business unit at SUSS MicroTec. "With this new technology, SUSS offers customers a low-cost option for sub-micron production with the added benefits of increased yield and throughput."

Contact printing has always offered image quality and resolution when paired with the appropriate wavelength light source (DUV, i-line, g-line, broadband) and matching photoresist process.
The availability of high quality sub-micron masks and damage caused by contact between the mask and wafer have prevented more wide-spread adoption.
"These results show that another option is available for sub-micron imaging at only a fraction of the cost of ownership of stepper technology," added Hermanowski.
"This technology has the potential to enable the manufacture of volume and diversity of products at economies not achievable through other means, or with such limited financial risk."Key companies featured:SUSS MicroTec
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Quality Today News - Karl Suss Offers Film Thickness Metrology Tool

www.qualitytoday.com [cached]

We do that by solving problems, developing innovative technology, and bringing new ideas to market, ' explained James Hermanowski, international product manager for Suss's Coating Business. ``The KT-22 specifically addresses a market where no solution previously existed, thus eliminating another barrier in applications where thick resist processing is a requirement.''.

Microlithography World - Low-cost lithography for 300mm wafer packaging

sst.pennnet.com [cached]

For more information, contact James Hermanowski, director of marketing at Süss MicroTec Inc., 228 Suss Dr., Waterbury Center, VT 05677; ph 802/244-5181, fax 802/244-5103, e-mail jhermanowski@suss.com.

Future Fab Intl.

www.future-fab.com [cached]

James Hermanowski, Süss MicroTec AG

Applications of Simulation Modeling at Texas Instruments DMOS5 Wafer Fab Future Fab Intl. Volume 15, July 11, 2003

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