However, Gerry Haugen, marketing manager for Litel, says that the project will last a minimum of six months.
"We think we have a unique technology that addresses lens issues at the 130-nm node."In addition to studying long-term lens degradation, the project will determine how much energy is pumped through the lens on a daily or weekly basis, Haugen
...Haugen says the main thrust behind the work with Sematech is to jointly understand what, if anything, has occurred to both the optics and the light source during the process.Haugen spent four years working at Cymer, the manufacturer of deep-UV illumination sources, and he decries the offhanded approach fabs often take during maintenance of their lithography tools.
"It's amazing that they can take from six to eight weeks to tune a laser at the Nikon or Canon
or ASML factory...and yet they take only about two hours in the field when they change the chamber, which essentially changes the [illumination] source," Haugen
says."That's always bothered me.How can they do that?How can they take such an intricate process... just change the chamber and, voilà, they're back and running and they don't take any steps to see if the alignment is as it should be at the reticle interface?"He
explains that mirror alignments can change, for example.
Perhaps the rush is tied to the fab manager's desire to keep the stepper running in order to meet uptime goals?
"That could be," Haugen
agrees."Lens assessment is a great theory.We've got to go out now and prove it."
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